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Ghodssi, Reza

Reza Ghodssi
Herbert Rabin Distinguished Chair in Engineering
Director, Institute for Systems Research
ECE/ISR
2173 A.V. Williams Building
Email: 
Phone: 
301. 405.8158
Fax: 
301.314.9920

Research Interests 

Design and development of microfabrication technologies and their applications to micro/nano devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting.

Background 

Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR) and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) and the Institute for Systems Research (ISR) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.

Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to micro/nano devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting. At Wisconsin, his Ph.D. thesis was focused on development of a high aspect ratio microfabrication process for an electrostatic driven MEMS device using x-ray lithography and LIGA technology. At MIT, he developed the building block MEMS fabrication technologies for a microturbine generator device, and also served as an Assistant Director on that project. At Maryland, his research group has pioneered the development of next generation PowerMEMS devices supported on micro-ball bearing, MEMS-based gray-scale technologies and the use of novel III-V optical MEMS devices and systems for chemical and biological detection.

Dr. Ghodssi's research has been funded by Army Research Lab (ARL), Department of Energy (DoE) National Science Foundation (NSF), Laboratory for Physical Sciences (LPS), NASA Goddard Space Flight Center (GSFC), National Institute of Standards and Technology (NIST) and R.W. Deutsch Foundation. He has served as a program co-chairman for the 2001 International Semiconductor Device Research Symposium (ISDRS) and as a chairman of the "MEMS and NEMS Technical Group" at the American Vacuum Society (AVS) from 2002 to 2004. Dr. Ghodssi was chair of the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009) and served as the Americas Technical Program Committee chair of IEEE SENSORS 2010 and 2011. He has chaired the committee for the Denice Denton Emerging Leader Award sponsored by Microsoft and the Anita Borg Institute for Women and Technology (ABI) since 2007.

Dr. Ghodssi has more than 98 scholarly publications, is the co-editor of the MEMS Materials and Processes Handbook published in 2011, and is an associate editor for the Journal of Microelectromechanical Systems (JMEMS) and Biomedical Microdevices (BMMD). Dr. Ghodssi has received the 2001 UMD George Corcoran Award, the 2002 National Science Foundation CAREER Award, and the 2003 UMD Outstanding Systems Engineering Faculty Award. He was among 100 of the nation's outstanding engineers invited to attend the National Academy of Engineering (NAE) U.S. Frontiers of Engineering Symposium in 2007 and the National Academy of Engineering (NAE) EU-U.S. Frontiers of Engineering Symposium in 2010. Dr. Ghodssi is the co-founder of MEMS Alliance in the greater Washington area and a member of the IEEE, AVS, MRS, ASEE and AAAS societies.

Honors and Awards 

   Young faculty awards

    •    NSF CAREER Award (2002)

University of Maryland Awards

    •    Outstanding Systems Engineering Faculty Award, Institute for Systems Research, University of Maryland (2003)
    •    George Corcoran Award, ECE Department, University of Maryland (2001)

Related News 

Lithium-ion battery research profiled in DOE newsletter
NEES EFRC researchers develop method to detect mechanical changes in electrodes. August 5, 2014

UMD Researchers Bridge Gap between Microelectronics, Biological Systems
“Electronic modulation of biochemical signal generation” published in Nature Nanotechnology July 28, 2014

ECE Graduate Student Sowmya Subramanian Wins 2014-15 All-S.T.A.R. Fellowship
Subramanian, working under the direction of ECE/ISR Professor Reza Ghodssi, was selected to receive this competitive Graduate School award. May 13, 2014

ECE Names 2013-2014 Distinguished Dissertation Fellows
Five ECE Ph.D. candidates selected for excellence in dissertation research. May 1, 2014

Ghodssi Named UMD Distinguished Scholar-Teacher
Professor Ghodssi is the 12th ECE Professor to be honored as a Distinguished Scholar-Teacher. March 19, 2014

Chu, Subramanian win MAMNA best grad student poster awards
ECE students are affiliated with the MEMS Sensors and Actuators Laboratory. March 12, 2014

Six ECE Graduate Students Selected as Future Faculty Fellows
Students striving toward a career in academia take part in a selective fellowship to prepare for the future. January 30, 2014

Six graduate students participating in UMD-Trento research exchange
The program is part of a broad partnership between Maryland and Trento, Italy. January 20, 2014

Young Wook Kim receives best poster presentation award
The ECE Ph.D. candidate won the award at the Bioscience and Engineering Symposium of the NIH Korean Scientists Association. December 10, 2013

Ghodssi Invited to Speak at IEEE Sensors 2013
Ghodssi delivers lecture on Microsystems for Sensing and Characterization of Bacterial Biofilms November 8, 2013