ENEE 416: Integrated Circuit (IC) Fabrication Lab (Fall 2011)

Assignments

Here is the list of assignments and group activities:

Assignments	Group Activity	Due Date
Assignment #1		9/08/2011
Assignment #2	Group 1: Miller Indices	9/15/2011
Assignment #3	Group 2: E-beam Lithography vs. X-ray Lithography	9/22/2011
Assignment #4	Group 3: Wet Isotropic and Anisotropic Etching of Si	9/29/2011
Assignment #5	Group 4: LIGA Lithography	10/06/2011
Assignment #6	Group 5: SEM vs FIB	10/13/2011
Assignment #7	Group 6: Damascene Process	10/20/2011
Assignment #8		10/27/2011
Assignment #9	Group 7: Diamond vs Graphene	11/10/2011
	Group 8: Double Patterning and Hyper-Numerical Aperture Immersion Lithography	11/17/2011
Assignment #10	Group 9: PECVD vs LPCVD	12/01/2011
Assignment #11