ENEE 416: Integrated Circuit (IC) Fabrication Lab (Fall 2011)

Assigned: 09/29/11

Due: 10/05/11, 5 pm  

Group: Hugo Ferrer and Bitew Dinke

Topic: LIGA Lithography

Explain the concepts and fundamentals, and its typical applications. Prepare a 10-minute PowerPoint presentation, a 2-3 page report using font Times New Roman 11 (including figures and references), and 4 problems with solutions. Please e-mail the PowerPoint presentation, the report (in pdf or Word), problems (in pdf or Word) and solutions (in pdf or Word) to Prof. Ghodssi and Mike Fan.

*LIGA Lithography Paper
*LIGA Lithography Presentation
*LIGA Lithography Questions
*LIGA Lithography Solutions