|
Teaching
ENEE 302:
Spring 00
|
Digital Electronics
Large signal terminal characteristics of P-N junction diodes, bipolar and
MOSFET transistors. Digital electronics at transistor level: inverter,
NAND, NOR AND, OR gates. CMOS and TTL logic. Combinatorial and sequential
digital circuits, memory design. Circuit simulation with SPICE.
|
ENEE 416:
Spring 01
Fall 01
Spring 02
Fall 03
Spring 04
Fall 05
Fall 07
|
Integrated Circuit Fabrication Lab
Characterization of wafers and fabrication steps. Oxide growth,
lithography, dopant diffusion, and metal deposition and patterning will be
discussed in the lectures and carried out in the lab in fabricating NMOS
transistor circuits. The transistor characteristics will be measured and
related to the fabrication parameters.
|
ENEE 605:
Fall 00
Fall 02
Fall 04
Fall 06
|
Design and Fabrication of Micro-Electro-Mechanical Systems (MEMS)
The goals of this course are to explore the world of
Micro-Electro-Mechanical Systems (MEMS) by understanding its design and
fabrication aspects. More specifically, students learn that MEMS are
sensors and actuators that are designed using different areas of
engineering disciplines and they are constructed using a
microlithographically-based manufacturing process in conjunction with both
semiconductor and micromachining microfabrication technologies. Different
examples of MEMS designs and fabrication technologies would be studied
that are currently employed in a wide range of devices, including
microaccelerometers for crash detection in vehicles, pressure sensors for
implantable medical devices, arrays of miniature mirrors for projection
displays, and systems for chemical detection and assay. The results of
homework, case studies and course project will prove the benefits of MEMS
devices, which include small size, low power consumption, ease of
integration into arrays, potential for monolithic integration with
electronics, and low cost in high volume.
|
ENEE 719F:
Spring 03
Spring 05
Spring 07
|
Advanced Topics in
Microelectronics: Fabrication and Testing of Micro-Electro-Mechanical
Systems
The goals of this course are to go beyond the "design stage" in
Micro-Electro-Mechanical Systems (MEMS) to provide students with a strong
background in fabrication, testing and characterization of MEMS. The main
focus is to understand the fundamental challenges and limitations involved
in developing and testing MEMS devices and systems. Various MEMS devices
will be developed based on preliminary designs from the earlier course,
ENEE 605 Design and Fabrication of MEMS, using MEMS fabrication and
instrumentation technologies. This is a "hands-on" course where students
are likely to spend an average of ten hours per week in the
cleanroom and testing labs. Students' progress will be monitored through
lab reports, monthly presentations and reports. The experimental
testing and characterization results will be compared with the original
models, giving a real world experience to the students.
|
|
|
