Reza Ghodssi
  Herbert Rabin Distinguished Chair in Engineering
  Director, Institute for Systems Research
 
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Teaching

ENEE 302:
Spring 00
Digital Electronics
Large signal terminal characteristics of P-N junction diodes, bipolar and MOSFET transistors. Digital electronics at transistor level: inverter, NAND, NOR AND, OR gates. CMOS and TTL logic. Combinatorial and sequential digital circuits, memory design. Circuit simulation with SPICE.

ENEE 416:
Spring 01
Fall 01
Spring 02
Fall 03
Spring 04
Fall 05
Fall 07
Fall 09
Fall 11

Integrated Circuit Fabrication Lab
Characterization of wafers and fabrication steps. Oxide growth, lithography, dopant diffusion, and metal deposition and patterning will be discussed in the lectures and carried out in the lab in fabricating NMOS transistor circuits. The transistor characteristics will be measured and related to the fabrication parameters.

ENEE 605:
Fall 00
Fall 02
Fall 04
Fall 06
Fall 08
Fall 10
Fall 12
Design and Fabrication of Micro-Electro-Mechanical Systems (MEMS)
The goals of this course are to explore the world of Micro-Electro-Mechanical Systems (MEMS) by understanding its design and fabrication aspects. More specifically, students learn that MEMS are sensors and actuators that are designed using different areas of engineering disciplines and they are constructed using a microlithographically-based manufacturing process in conjunction with both semiconductor and micromachining microfabrication technologies. Different examples of MEMS designs and fabrication technologies would be studied that are currently employed in a wide range of devices, including microaccelerometers for crash detection in vehicles, pressure sensors for implantable medical devices, arrays of miniature mirrors for projection displays, and systems for chemical detection and assay. The results of homework, case studies and course project will prove the benefits of MEMS devices, which include small size, low power consumption, ease of integration into arrays, potential for monolithic integration with electronics, and low cost in high volume.

ENEE 719F:
Spring 03
Spring 05
Spring 07
Spring 09
Advanced Topics in Microelectronics: Fabrication and Testing of Micro-Electro-Mechanical Systems
The goals of this course are to go beyond the "design stage" in Micro-Electro-Mechanical Systems (MEMS) to provide students with a strong background in fabrication, testing and characterization of MEMS. The main focus is to understand the fundamental challenges and limitations involved in developing and testing MEMS devices and systems. Various MEMS devices will be developed based on preliminary designs from the earlier course, ENEE 605 Design and Fabrication of MEMS, using MEMS fabrication and instrumentation technologies. This is a "hands-on" course where students are likely to spend an average of ten hours per week in the cleanroom and testing labs. Students' progress will be monitored through lab reports, monthly presentations and reports.  The experimental testing and characterization results will be compared with the original models, giving a real world experience to the students.