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Rubloff, Gary W.

Gary W. Rubloff
Professor, Director of Maryland NanoCenter
ISR, ECE, NanoCenter
1128 Jeong H. Kim Building
Email: 
Phone: 
(301)405-3011

Research Interests 

  • Biomaterials and biomicrosystems (bioMEMS)
    • Programmable biopolymer deposition
    • BioMEMS devices, process integration, packaging, and control
    • Real-time diagnostics
  • Electronic materials, processes, and equipment
    • Combinatorial CVD and ALD
    • Atomic layer deposition
    • Semiconductor materials, processing, and characterization
  • Semiconductor manufacturing
    • Sensing and advanced process control for widegap semiconductor growth
    • Real-time chemical process sensing for metrology and advanced process control
    • Simulation and optimization in dynamic process systems
  • Nanoscale systems
    • Nanocomponent decoration
    • Directed assembly
  • Teaching interests
    • Electronic materials processing
    • Materials science and systems applications
    • Vacuum process systems for semiconductor manufacturing
    • Simulation-based engineered learning systems

Background 

Dr. Rubloff has published over 160 papers, holds 19 patents and 6 IBM Invention Achievement Awards. He won the AVS Gaede-Langmuir Prize in 2000 "for inventive application of surface science and vacuum technology to the semiconductor industry, and for fostering an effective bridge between AVS research and manufacturing". This award was established 1977 to recognize and encourage outstanding discoveries and inventions in the sciences and technologies of interest to the AVS. He is a Fellow of APS and AVS. His research has included solid state physics, surface physics and chemistry, interfaces, semiconductor materials and processing science and technology, process diagnostics and modeling, manufacturing science, combinatorial materials science, biomaterials and bioMEMS. His semiconductor process research has emphasized the elucidation of chemical and physical mechanisms involved in surface cleaning, thermal oxidation, chemical vapor deposition, and plasma etching, and in pursing these directions he pioneered the exploitation of ultrahigh vacuum process environments and their integration with in-situ surface and interface diagnostics.

Dr. Rubloff received his B.A. in Physics magna cum laude from Dartmouth College in 1966, his M.S. in 1967 and his Ph.D. in 1971 in Physics from the University of Chicago. He held a postdoctoral position in Physics at Brown University from 1971 to 1973. In 1973 he joined IBM Research, Yorktown Heights, NY, as a Research Staff Member in the Physical Sciences Department, were he worked on surface and interface science. In 1984-85 he served as Technical Assistant to the IBM Research Vice-President for Logic and Memory, and from 1985 to 1991 he continued his research while serving in several capacities as Manager of exploratory materials and processing in the Silicon Technology Department. From 1992-1993 he was Manager of Thin Film Process Modeling in the Manufacturing Research Department. From 1992 to 1997 he was also Professor Adjunct in Electrical Engineering at Yale University.

He joined academia in 1993 as Associate Director of the NSF Engineering Research Center for Advanced Electronic Materials Processing and Professor of Electrical and Computer Engineering at North Carolina State University, focusing on real-time process sensing, simulation, optimization, and control.

In 1996 he joined the University of Maryland as Professor in the Department of Materials and Nuclear Engineering and the Institute for Systems Research. He served as Director of the Institute from 1996 to 2001. In 2004 he was named Minta Martin Professor of Engineering and assumed the position of founding Director of the Maryland NanoCenter.

Dr. Rubloff was the founding Chairman of the AVS Manufacturing Science and Technology Group from 1992-1997 and continues to serve on its Executive Committee. He has been a member of the Metrology Technical Working Group for the SIA's National Technology Roadmap for Semiconductors since its inception in 1994. He has been active in professional society work, including the Board of Directors of the AVS, Executive Committees of the AVS Electronic Materials and Processing Division, the APS Materials Physics Division, and the Editorial Board of the Journal of Vacuum Science and Technology. He has long been active in civic affairs, included 11 years service as an elected Member, Vice-President, and President of a local Board of Education in New York State.

Related News 

UMD Researchers Bridge Gap between Microelectronics, Biological Systems
“Electronic modulation of biochemical signal generation” published in Nature Nanotechnology July 28, 2014

UMD Nets a DOE Award for Innovative Energy Research Projects
Projects will help enable advances in energy production and use June 18, 2014

Rubloff, Ghodssi featured in JVST-A special issue
The Journal of Vacuum Science & Technology A is celebrating the 60th anniversary of the American Vacuum Society. October 30, 2013

New Minta Martin Professors Named
Historic honor recognizes full professors who have made significant scholarly contributions. July 19, 2012

2012 Energy Research Fellows Announced
Awards will fund diverse sustainable energy research projects March 8, 2012

Preventing Costly, Life-Threatening Catheter Infections
Deutsch Foundation-sponsored Clark School research offers multi-pronged attack on major medical problem. January 18, 2012

Clark School researchers figure prominently in atomic layer deposition story
Chemical & Engineering News highlights expansion of the coating technology. August 3, 2011

Systems Researchers Partner with Trento, Italy
Joint efforts to target bioengineering, renewable energy, nanomaterials, microsystems, education. May 26, 2011

Espy-Wilson, Rubloff Are Top UM Inventors
Speech enhancing algorithm, high-density energy storage cells named best of '09. April 14, 2010

Reza Ghodssi guest edits special issue of IEEE Transactions on Industrial Electronics
'Special Proceeding' issue focuses on energy harvesting. March 3, 2010