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Melngailis, John

Professor Emeritus
1202P, Energy Research Facility
(301) 405-4916

Research Interests 

Professor Melngailis' research interests are Focused Ion Beam (FIB) nanofabrication: devices, materials and process development, electrical contacts to nanofibers and nanotubes by FIB, beam-induced deposition and etching, and patterning of graphene.


  • Introduced and developed courses:
    • ENEE 719A "Nanostructure Fabrication"
    • ENEE 416 "Integrated Circuit Fabrication" (lecture and lab)
  • Other courses taught more than once:
    • ENEE 600 "Solid State Electronics" (graduate core course)
    • ENEE 313 "Semiconductor Device Physics"
    • ENEE 480 "Fundamentals of Solid State Electronics"



B.S., M.S., and Ph.D in physics, Carnegie Mellon University

Selected Publications 

  • I. Utke, P. Hoffmann, and J. Melngailis, (review article), "Gas assisted focused electron beam and ion beam processing and fabrication," J. Vac. Sci. Technol. B26, 1198 (2008). (PDF)
  • Abhishek Motayed, A. Davydov, S. N. Mohammad, J. Melngailis, "Experimental investigation of electron transport properties of gallium nitride nanowires," J. Appl. Phys. 104 [2], 024302 (2008). (PDF)
  • Abhished Motayed, A. Davydov, M. Q. He, S. N. Mohammad, and J. Melngailis, "365 nm operation of n-nanowire/p-gallium nitride homojunction light emitting diodes," Appl. Phys. Lett. 90 [18], 183120 (2007). (PDF)
  • J. D. Barry, M. Erwin, J. Molstad, A. Wickenden, T. Brintlinger, P. Hoffmann, and J. Melngailis, "Electron beam induced deposition of low resistivity platinum from Pt(PF3)4," J. Vac. Sci. Technol. B24, 3165 (2006). (PDF)
  • W. Jeon, T. Firestone, J. Rodgers, and J. Melngailis, "On-chip RF pulse power detector using FIB as a post-CMOS fabrication process," Electromagnetics 26 [1], 103 (2006). (PDF)
  • Anthony De Marco, William Bandy, Sia Parsa, Henry Kaufman, and John Melngailis, "Writing the identity in RFID tags with focused ion beam implantation of transistor gates," J. Vacuum Sci. Technol. B23, 2811 (2005). (PDF)
  • T. Brintlinger, M. S. Fuhrer, John Melngailis, T. Bret, I. Utke, P. Hoffmann, P. Doppelt, and M. Abourida, "Electrodes for carbon nanotube devices by focused electron beam induced deposition of gold," J. Vacuum Sci. Technol. B23, 3174 (2005). (PDF)
  • Woochul Jeon, Todd M. Firestone, John C. Rodgers, and John Melngailis, "Design and fabrication of Schottky diode, on-chip RF power detector," Solid State Electron. 48, 2089 (2004). (PDF)
  • Anthony J. De Marco and John Melngailis, "Maskless fabrication of JFETs via focused ion beams," Solid State Electron. 48, 1833 (2004). (PDF)
  • Anthony De Marco and John Melngailis, "Lateral growth of focused ion beam d eposited platinum for stencil mask repair," J. Vacuum Sci. Technol. B17 [6], 3154 (1999).


Honors and Awards 

    •    IEEE Fellow

Related News 

ECE Faculty Honored at Inaugural Scholarship & Research Celebration
Twenty-seven ECE faculty members honored, representing 1/8 of researchers recognized university-wide. May 2, 2008

Melngailis Appointed Guest Professor at Technical University of Vienna
Melngailis will teach at Austrian university as part of the Fulbright Senior Specialist Program. March 13, 2008

Undergraduate Research Shines at MERIT Fair
National program attracts top students for cross-disciplinary, team-based research. August 15, 2006