Mechanical Engineering Seminar Series: Silicon Carbide Micro-/Nanosystems for Sensing & Energy Appl.
Friday, December 6, 2013
For More Information: http://www.enme.umd.edu/events/seminars
Silicon Carbide Micro-/Nanosystems for Sensing and Energy Applications
Speaker: Roya Maboudian, Ph.D., Professor, Chemical/Biomolecular Engineering, University of California, Berkeley
Abstract: Silicon carbide (SiC), a wide bandgap semiconductor, is emerging as a material to address the limitations of silicon as it is temperature tolerant, radiation resistant, and chemically inert. In this talk, Maboudian will present recent advances in the materials science and manufacturing technology of SiC thin film and low dimensional structures. This includes deposition, metallization, and fabrication of semiconductor microdevices, with particular emphasis on sensor and energy technologies.