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Wednesday,
February 9, 2000
"Future Trends in IC Fabrication: Advanced
e-beam Lithography"
Hans Pfeiffer, from the IBM Corporation Semiconductor Research and Development
Center, in East Fishkill, NY
Room
2328 A.V. Williams Bldg., 5:00 P.M.
Read the Abstract
For more information about
the Microelectronics Seminar Series, please contact Prof. Robert Newcomb,
at (301)405-3662, or at newcomb@eng.umd.edu.
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