Etiquette In The Clean Room
  • Get training and official check-out before using any equipment.
  • If you encounter problems/questions that you don't know what to do when dealing with any equipment, ask other people before you go further. Don't be afraid to ask.
  • Don't use Al hot plate to heat up liquid, use ceramic one.
  • Don't put Al hot plates in the acid hood.
  • When use hot plate to heat up liquids, try to cover the hot plate with wipe or Al foil. If dirty the plate, make sure to clean it afterall.
  • Try not to do development in the hood of the lithography bay.
  • If you see one or more people working in the lithography hood, don't use solvents to clean your samples because there are good chances that you may spill solvents on their samples. If you really have to do the cleaning, move the waste container to the corner of the bench and spray gently.
  • Don't disperse your personal stuff (like tweezers, glooves, beakers, etc.) in the public places. Always check if you leave anything anywhere before you take off.
  • If working in the chemical benches, always leave a wipe as a working place, and leave your name and chemical name on the wipe or note.
  • Always refill the Acetone, Methanol, and IPA if you see the bottle is running low. If you use up the gallon size container of solvent, rinse it out and leave it in the chemistry bay, by the wall under the phone, near the dumbwaiter. There are more containers of solvents in the cabinet there. If the waste container on the benchtop in the hood is almost full, empty it into the 5 gallon container under the bench.
  • When bake PI, EPON, or other sticky polymers, leave a dummy wafer under your sample to avoid polymer residual on the hot plate.
  • Don't use Aceton or IPA to wipe/touch o-ring of any vacuum chamber.
  • Others regarding to equipment usage:
    • Don't leave the UV light of the flood exposer on if you are not exposing.
    • Don't overpump the roughing pump under the required pressure (which is dependent on different machine).
    • Don't overtighten the high-vacuum valve of the evaporator
ALL IN ALL - TRY TO BE A RESPONSIBLE PERSON AND GROUP MEMBER.