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Other Research Labs Berkeley Sensors and Actuators Center (BSAC) Caltech Micromachining Lab Carnegie Mellon Case Western Reserve Center for MicroElectronic Sensors and MEMS at the University of Cincinnati Center for Wireless Integrated Microsystems (WIMS) Georgia Tech (Allen group) Microsensor and Actuator Technology Center at TU Berlin Microsystems Technology Laboratories Stanford Micro Structures and Sensors Laboratory (Kenny group) Stanford Transducers (Kovaks group) University of Washington (Bohringer group) University of Wisconsin (Beebe group)