The MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE), the Institute for Systems Research (ISR), the Maryland Nanocenter, Fischell Department of Bioengineering (BIOE), University of Maryland Energy Research Center (UMERC), A.J. Clark School of Engineering , University of Maryland (UMD) was established in January 2000. Since then, a wide variety of projects have been pursued in the fields of MEMS and NEMS Fabrication Technologies and Devices. We have a history of developing III-V optical MEMS devices in InP and are working toward integrated biosensing concepts to complement ongoing research using the biopolymer chitosan for biodetection. Other research thrusts include the development of 3-D fabrication techniques and microball bearing technologies for Power MEMS applications such as microgenerators, micromotors, and micropumps. With the advent of new energy harvesting methods, we hope to converge our research areas towards adaptive, self sustaining microsystems. The research activities at MSAL are supported by Army Research Lab (ARL), National Science Foundation (NSF), Laboratory for Physical Sciences (LPS), NASA Goddard Space Flight Center (GSFC), National Institute of Standards and Technology (NIST) and R.W. Deutsch Foundation.

2201 J.M. Patterson Building
University of Maryland
College Park, MD 20742
Phone: 301.405.1897

Directions:
Google Maps can help you get to the University of Maryland. UMD makes frequent bus runs to the College Park Metro station. If you prefer to drive, here are some very detailed directions to the College Park campus. If you prefer to take the easily accessible Washington Metropolitan Metrorail System, here is an useful Metrorail System map. Once you're here, you can get your bearings on the University Campus Map.